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Hexagonal BN films have been deposited by rf-magnetron sputtering with simultaneous ion plating. The elastic properties of the films grown on silicon substrates under identical coating conditions have been de-termined by Brillouin light scattering from thermally excited surface phonons. Four of the five independent elastic constants of the deposited material are found to be c11 = 65 GPa, c13 = 7 GPa, c33 = 92 GPa and c44 = 53 GPa exhibiting an elastic anisotropy c11/c33 of 0.7. The Young's modulus determined with load indenta-tion is distinctly larger than the corresponding value taken from Brillouin light scattering. This discrepancy is attributed to the specific morphology of the material with nanocrystallites embedded in an amorphous matrix.
Phase velocities of surface acoustic waves in several boron nitride films were investigated by Brillouin light scattering. In the case of films with predominantly hexagonal crystal structure, grown under conditions close to the nucleation threshold of cubic BN, four independent elastic constants have been determined from the dispersion of the Rayleigh and the first Sezawa mode. The large elastic anisotropy of up to c11/c33 = 0.1 is attributed to a pronounced texture with the c-axes of the crystallites parallel to the film plane. In the case of cubic BN films the dispersion of the Rayleigh wave provides evidence for the existence of a more compliant layer at the substrate-film interface. The observed broadening of the Rayleigh mode is identified to be caused by the film morphology.