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Calibration sample for arbitrary metrological characteristics of optical topography measuring instruments

  • Areal optical surface topography measurement is an emerging technology for industrial quality control. However, neither calibration procedures nor the utilization of material measures are standardized. State of the art is the calibration of a set of metrological characteristics with multiple calibration samples (material measures). Here, we propose a new calibration sample (artefact) capable of providing the entire set of relevant metrological characteristics within only one single sample. Our calibration artefact features multiple material measures and is manufactured with two-photon laser lithography (direct laser writing, DLW). This enables a holistic calibration of areal topography measuring instruments with only one series of measurements and without changing the sample.

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Author:Matthias Eifler, Julian Hering, Georg von Freymann, Jörg Seewig
URN (permanent link):urn:nbn:de:hbz:386-kluedo-53512
Parent Title (English):Optics Express
Document Type:Article
Language of publication:English
Publication Date:2018/08/08
Year of Publication:2018
Publishing Institute:Technische Universität Kaiserslautern
Date of the Publication (Server):2018/08/08
Issue:Vol. 26, No. 13
Number of page:15
Faculties / Organisational entities:Fachbereich Maschinenbau und Verfahrenstechnik
DDC-Cassification:6 Technik, Medizin, angewandte Wissenschaften / 620 Ingenieurwissenschaften und Maschinenbau
Licence (German):Zweitveröffentlichung