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Functional Metallic Microcomponents via Liquid-Phase Multiphoton Direct Laser Writing: A Review

  • We present an overview of functional metallic microstructures fabricated via direct laser writing out of the liquid phase. Metallic microstructures often are key components in diverse applications such as, e.g., microelectromechanical systems (MEMS). Since the metallic component’s functionality mostly depends on other components, a technology that enables on-chip fabrication of these metal structures is highly desirable. Direct laser writing via multiphoton absorption is such a fabrication method. In the past, it has mostly been used to fabricate multidimensional polymeric structures. However, during the last few years different groups have put effort into the development of novel photosensitive materials that enable fabrication of metallic—especially gold and silver—microstructures. The results of these efforts are summarized in this review and show that direct laser fabrication of metallic microstructures has reached the level of applicability.
Metadaten
Author:Erik Hagen WallerORCiD, Mark Stefan Dix, Jonas Gutsche, Artur WideraORCiD, Georg von FreymannORCiD
URN (permanent link):urn:nbn:de:hbz:386-kluedo-58989
ISSN:2072-666X
Parent Title (English):Micromachines
Publisher:MDPI
Document Type:Article
Language of publication:English
Publication Date:2019/11/28
Year of Publication:2019
Publishing Institute:Technische Universität Kaiserslautern
Date of the Publication (Server):2020/02/18
Issue:2019, 10(12)
Number of page:17
Source:https://www.mdpi.com/2072-666X/10/12/827
Faculties / Organisational entities:Fachbereich Physik
DDC-Cassification:5 Naturwissenschaften und Mathematik / 530 Physik
Collections:Open-Access-Publikationsfonds
Licence (German):Zweitveröffentlichung