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Exploiting Direct Laser Writing for Hydrogel Integration into Fragile Microelectromechanical Systems

  • The integration of chemo-responsive hydrogels into fragile microelectromechanical systems (MEMS) with reflective surfaces in the micron to submicron range is presented. Direct laser writing (DLW) for 3D microstructuring of chemoresponsive “smart” hydrogels on sensitive microstructures is demonstrated and discussed in detail, by production of thin hydrogel layers and discs with a controllable lateral size of 2 to 5 µm and a thickness of some hundred nm. Screening results of polymerizing laser settings for precision microstructuring were determined by controlling crosslinking and limiting active chain diffusion during polymerization with macromers. Macromers are linear polymers with a tunable amount of multifunctional crosslinker moieties, giving access to a broad range of different responsive hydrogels. To demonstrate integration into fragile MEMS, the gel was deposited by DLW onto a resonator with a 200 nm thick sensing plate with high precision. To demonstrate the applicability for sensors, proof of concept measurements were performed. The polymer composition was optimized to produce thin reproducible layers and the feasibility of 3D structures with the same approach is demonstrated.
Metadaten
Author:Julian MengesORCiD, Steffen Klingel, Egbert OesterschulzeORCiD, Hans-Jörg Bart
URN (permanent link):urn:nbn:de:hbz:386-kluedo-58090
ISSN:1424-8220
Parent Title (English):Sensors
Publisher:MDPI
Document Type:Article
Language of publication:English
Publication Date:2019/05/31
Year of Publication:2019
Publishing Institute:Technische Universität Kaiserslautern
Date of the Publication (Server):2019/12/06
Issue:2019, 19 (11)
Number of page:9
Source:https://www.mdpi.com/1424-8220/19/11/2494
Faculties / Organisational entities:Fachbereich Maschinenbau und Verfahrenstechnik
DDC-Cassification:5 Naturwissenschaften und Mathematik / 530 Physik
Collections:Open-Access-Publikationsfonds
Licence (German):Zweitveröffentlichung